Fundamental Principles of Optical Lithography
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Información del producto
| ISBN | 9780470727300 |
|---|---|
| Editorial | John Wiley & Sons Inc |
| Precio (sin IVA) | 87,64 € |
| Impuestos | 5,26 € |
| Precio (IVA incluido) | 92,90 € |
| Disponibilidad | 2 Unidades En almacén externo |
Descripción del producto
Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This sole-authored text includes optional computer simulation exercises as well as problems at the end of each chapter.